Rigaku Working with Imec to Accelerate Next-Gen Semiconductor Metrology Development

Why It Matters

Accurate, non‑destructive metrology is critical for scaling AI‑centric chips, and Rigaku’s imec alliance positions it to capture a sizable share of a rapidly expanding market.

Key Takeaways

• Rigaku partners with imec in three‑year semiconductor metrology program.
• Focus on 3D device metrology, ultrathin film detection, defect inspection.
• Targeting advanced AI chip market worth ~$1 billion by 2030.
• Aims for 50% share of SAM through differentiated X‑ray solutions.
• Addresses GAA, CFET, 3D DRAM challenges with non‑destructive measurements.

Pulse Analysis

The semiconductor industry is confronting unprecedented design intricacy as manufacturers shift toward Gate‑All‑Around (GAA), Complementary FET (CFET) and stacked‑memory architectures. These advances demand measurement tools that can probe nanometer‑scale features without damaging the wafer, ensuring yield stability across high‑volume production lines. Traditional optical metrology struggles with the shrinking critical dimensions, prompting a surge in X‑ray‑based solutions that offer deeper penetration and elemental sensitivity.

Rigaku’s three‑year alliance with imec leverages the Belgian institute’s cutting‑edge lithography and materials research facilities to refine Rigaku’s core X‑ray technologies. The collaboration focuses on three pillars: three‑dimensional device metrology for complex logic structures, ultra‑sensitive detection of ultrathin films and trace contaminants, and non‑destructive inspection of microscopic defects across wafers and reticles. By integrating imec’s expertise in nanoscale imaging with Rigaku’s commercial metrology platforms, the joint program aims to deliver turnkey solutions that accelerate time‑to‑market for next‑gen chips.

From a business perspective, the partnership targets the burgeoning AI semiconductor segment, projected to generate roughly $1 billion in serviceable market revenue by 2030. Rigaku’s ambition to secure half of this market hinges on its ability to differentiate through high‑value, precision measurement tools that address the most demanding process nodes. Success will not only boost Rigaku’s revenue streams but also reinforce its position as a strategic supplier in the semiconductor supply chain, supporting manufacturers as they navigate the complexities of advanced packaging and 3D DRAM integration.