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Automated Stochastics Metrology Drives Production Decisions at Top-Five Device Maker

Fractilia announced that its FAME 300 stochastic metrology system is now in‑line at a top‑five semiconductor device maker, marking the first full‑scale deployment of automated stochastic control in production. The solution monitors more than 200 metrology steps, generating real‑time SPC charts and lot disposition without human intervention. By embedding FILM‑based measurements into the fab’s host and MES, the customer can capture linewidth roughness, line edge roughness and local CD uniformity instantly. The rollout highlights the industry’s shift from treating stochastics as an R&D issue to a production‑critical metric.